I don't know what is Benford's distribution. Is it the discrete distribution with the ffollowing pmf?
P(X = d) = log_{10}(1 + \frac{1}{d}), d \in {1, 2, \dots, 9}
(I'm just guessing from this)
If so, then you can do the following to generate the first digits as follows. I don't know the distributions for other positions. You can generate similarly and then use paste.
sample(x = 1:9,
size = 10000, # required bumber of observations
replace = TRUE,
prob = log10(x = (1 + (1 / (1:9)))))
Hope this helps.